A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals
A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals
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DOI：
10.1088/0960-1317/16/12/004
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发表时间：
2006-12-01
影响因子：
2.3
通讯作者：
Li, Xinxin
中科院分区：
文献类型：
--
作者：
Li, Peng;Li, Xinxin
本文提出了一种新型的SiO2微悬臂梁传感器，用于高灵敏的气体化学检测。一个薄的单晶硅压敏电阻集成在SiO2悬臂低噪声和高分辨率的信号读出。本文叙述了该传感器的MEMS构成、建模和检测实验。悬臂梁传感器的微制造在硅晶片的单侧（前侧）处进行处理，结合感测悬臂梁上的自组装单层（SAM）的功能化以用于特定分子捕获。通过理论分析和仿真计算，建立了压阻式SiO_2悬臂梁传感器的数学模型，并与实测数据进行了比较。通过对悬臂梁表面修饰特定的SAM，实验获得了传感器的检测性能。由于SiO_2压阻悬臂梁的高灵敏度和低电噪声，0.1ppm级浓度的氨气和10 ppb浓度的甲基膦酸二甲酯蒸气已被很好地检测。这种集成的荧光检测器有望用于廉价、高分辨率和便携式的化学/生物检测。
This paper presents a novel SiO2 microcantilever sensor for high-sensitive gaseous chemical detection. A thin single-crystalline silicon piezoresistor is integrated in the SiO2 cantilever for low-noise and high-resoluble signal readout. The paper relates the MEMS formation, modeling and detecting experiments of the sensor. The micro-fabrication of the cantilever sensor is processed at a single side (front side) of the silicon wafer, combined with functionalization of a self-assembled monolayer (SAM) on the sensing cantilever for specific molecular capturing. The model of the piezoresistive SiO2 cantilever sensor is given by using both analysis and simulation, resulting in good agreement with the measuremental data. With the cantilever modified by the specific SAM, the detecting performance of the sensor is experimentally obtained. Attributed to the high sensitivity and the low electric noise of the piezoresistive SiO2 cantilever, ammonia gas of 0.1 ppm level concentration and dimethyl methylphosphonate vapor of 10 ppb concentration have been well detected. The integrated cantilevers are promising for inexpensive, highly resoluble and portable chemical/biological detection.