Table-top soft x-ray microscope using laser-induced plasma from a pulsed gas jet.
Table-top soft x-ray microscope using laser-induced plasma from a pulsed gas jet.
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使用来自脉冲气体射流的激光诱导等离子体的台式软 X 射线显微镜。
作者：
M. Müller;T. Mey;J. Niemeyer;K. Mann
本文介绍了一种工作在波长λ = 2.88 nm的“水窗”区的超小型软X射线显微镜，它利用脉冲氮气射流靶产生的长期稳定的、几乎无碎片的激光等离子体。特征良好的软X射线辐射由椭球掠入射聚光镜聚焦。样品在CCD相机上的成像是通过菲涅耳波带片实现的，放大倍数高达500倍。所记录的显微图像的空间分辨率为约100 nm，如西门子星星测试图案所示。
An extremely compact soft x-ray microscope operating in the "water window" region at the wavelength λ = 2.88 nm is presented, making use of a long-term stable and nearly debris-free laser-induced plasma from a pulsed nitrogen gas jet target. The well characterized soft x-ray radiation is focused by an ellipsoidal grazing incidence condenser mirror. Imaging of a sample onto a CCD camera is achieved with a Fresnel zone plate using magnifications up to 500x. The spatial resolution of the recorded microscopic images is about 100 nm as demonstrated for a Siemens star test pattern.