A new cantilever system for gas and liquid sensing
A new cantilever system for gas and liquid sensing
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DOI：
10.1016/s0304-3991(03)00068-8
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发表时间：
2003-10-01
期刊：
影响因子：
2.2
通讯作者：
Ziegler, C
中科院分区：
文献类型：
--
作者：
Vidic, A;Then, D;Ziegler, C
开发并测试了一种新颖的气体和液体传感装置。它基于频移和微悬臂梁弯曲的检测来测量质量变化和粘度变化。为了驱动悬臂梁，发明了新的静电和磁驱动装置，并带有闭合反馈环路，迫使悬臂梁始终以其共振频率振荡。通过光束偏转技术检测振荡。通过测量光电二极管的直流信号，可以同时监测悬臂梁的静态弯曲。闭合反馈环路在谐振频率下传播非常稳定的振荡，并且与没有这种反馈环路的系统相比，品质因数显着增加。此外，还可以进行操作。因此，这些悬臂传感器显示出在用于气相和液相化学和生化传感的易于使用且高灵敏度的传感器系统中使用的潜力。 (C) 2003 Elsevier Science B.V. 保留所有权利。
A novel setup for gas and liquid sensing was developed and tested. It is based on both detection of frequency shift and of bending of micro-cantilevers to measure mass changes as well as viscosity changes. To drive the cantilevers new electrostatic and magnetic actuations were invented with a closed feed-back loop which forces the cantilever to oscillate always at its resonance frequency. The oscillation is detected via the beam-deflection technique. By measuring the DC signal of the photodiode the static bending of the cantilever can be monitored simultaneously. The closed feed-back loop propagates a very stable oscillation at the resonance frequency and gives a strong increase in the quality factor compared to a system without such feed-back loop. Furthermore, it is possible to operate. this cantilever transducer system in liquids.These cantilever sensors hence, show the potential for use in easy-to-use and highly sensitive sensor systems for gas and liquid phase chemical and biochemical sensing. (C) 2003 Elsevier Science B.V. All rights reserved.