Nanometric cutting: Mechanisms, practices and future perspectives
Nanometric cutting: Mechanisms, practices and future perspectives
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DOI：
10.1016/j.ijmachtools.2022.103905
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发表时间：
2022-06-02
影响因子：
14
通讯作者：
Yan, Yongda
中科院分区：
文献类型：
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作者：
Fang, Fengzhou;Lai, Min;Yan, Yongda
纳米级切割可以在纳米级去除材料，并生成具有纳米级光洁度的高质量表面。在过去的几十年里，它作为一种主流制造技术蓬勃发展，用于生产关键零部件，以推进科学发现和促进各个领域的创新，如天文、航空航天、微电子、光学和光子学、生物和量子技术。因此，现在是时候撰写一篇评论文章，记录这些发展并为未来的发展确定方向。本文系统地综述了纳米加工中的切削模型、材料变形机理和刀具磨损等基本问题。还介绍了离子注入辅助、激光辅助和超声振动辅助纳米切割的创新方法的工作原理，以克服加工难切割材料的挑战。还讨论了生成高质量复杂曲面或结构化曲面的实用技术。最后，概述了纳米切割面临的挑战和未来的前景，以及向原子和近原子规模制造的演变。
Nanometric cutting removes material at nanoscale and generates high-quality surfaces with a nanometric finish. In past decades, it has thrived as a mainstream manufacturing technology to produce critical components to advance scientific discovery and promote innovation in various fields, such as astronomy, aerospace, microelectronics, optics and photonics, biology and quantum technology. Therefore, it is timely to develop a review article capturing such developments and establishing directions for future advancement. This article systematically reviews the fundamental issues such as cutting model, material deformation mechanism and tool wear in nanometric cutting. It also presents the working principles of innovative ion implantation-assisted, laser-assisted and ultrasonic vibration-assisted nanometric cutting methods to overcome the challenges of machining difficult to-cut materials. Practical techniques for the generation of high-quality complex or structured surfaces are also discussed. Finally, challenges and future perspectives of nanometric cutting, as well as the evolution towards atomic and close-to-atomic scale manufacturing, are outlined.