Residual gas: Traditional understanding and new experimental results
Residual gas: Traditional understanding and new experimental results
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DOI：
10.1016/s0042-207x(98)00386-8
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发表时间：
1999-05-01
期刊：
影响因子：
4
通讯作者：
Fremerey, JK
中科院分区：
文献类型：
--
作者：
Fremerey, JK
一氧化碳和其他碳衍生物被认为是很长一段时间内的固有成分的残余气氛中的超高真空（超高真空）设备。不锈钢容器中的残余气体实际上是纯氢气，这一点现在已逐渐被人们所接受。杂质气体，特别是一氧化碳，由于离子诱导的表面过程，由离子计和质谱仪以显著的速率产生。杂质气体可能严重影响敏感表面分析和工艺。建议在极高真空条件的定义中应包括排除离子感生杂质气体的要求。它表明，更长的烘烤时间比今天的实践是需要严格的除气不锈钢。发现在室温密封条件下，烘烤良好的不锈钢容器内的氢气压力饱和约为0.2 mPa。(C)1999年由爱思唯尔科学有限公司出版。保留所有权利。
Carbon monoxide and other carbon derivatives were considered for a long time as intrinsic constituents of the residual atmosphere inside a UHV (ultra high vacuum) apparatus. It is gradually being accepted now that the residual gas in stainless steel containers is virtually pure hydrogen. Impurity gases, especially carbon monoxide, are generated at a significant rate by ion gauges and mass spectrometers due to ion-induced surface processes. Impurity gases may severely affect sensitive surface analysis and processes. It is proposed that a definition of XHV (extremely high vacuum) conditions should include the requirement that ion-induced impurity gases are excluded. It is demonstrated that much longer baking times than practiced today are required for rigorous outgassing of stainless steel. The hydrogen pressure inside a well baked stainless steel container was found to saturate at about 0.2 mPa under seal-off conditions at room temperature. (C) 1999 Published by Elsevier Science Ltd. All rights reserved.