Micro electrochemical milling
Micro electrochemical milling
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DOI：
10.1088/0960-1317/15/1/019
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发表时间：
2005-01-01
影响因子：
2.3
通讯作者：
Chu, CN
中科院分区：
文献类型：
--
作者：
Kim, BH;Ryu, SH;Chu, CN
介绍了用于制造微结构的电化学加工技术。通过施加超短脉冲，可以将工件的溶解限制在非常靠近电极的区域。利用该方法在不锈钢表面加工了三维微结构。在低浓度的电解液中，0.1M的H_2SO_4溶液中，可获得良好的表面质量。在电解加工中，随着加工深度的增加，组织逐渐变细。为了减小锥度，引入了圆盘型电极。通过电化学球磨，制备了包括直径为60gm的半球在内的各种三维微结构。
In this paper, electrochemical machining (ECM) for fabricating micro structures is presented. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to an electrode. Using this method, 3D micro structures were machined on stainless steel. Good surface quality of the structures was obtained in the low concentration electrolyte, 0.1 M H2SO4. In ECM, when the machining depth increases, structures taper. To reduce the taper, a disc-type electrode is introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 gm diameter were fabricated.