Optomechanical inertial sensors
Optomechanical inertial sensors
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DOI：
10.1364/ao.393061
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发表时间：
2020-08-01
期刊：
影响因子：
1.9
通讯作者：
Guzman, Felipe
中科院分区：
文献类型：
--
作者：
Hines, Adam;Richardson, Logan;Guzman, Felipe
我们提出了紧凑型单片光机械惯性传感器的性能分析，描述了它们的关键基本限制和整体加速度本底噪声。低频重力敏感惯性传感器的性能仿真显示，可达到的加速度本底噪声约为 1 x 10(-11) m/s(2) root Hz。此外，根据我们的性能模型，我们为传感器设计、灵敏度和带宽交换空间设计了一种优化方法。我们对这些紧凑型机械谐振器进行了表征测量，展示了 250 kg 水平的 mQ 产品，这凸显了它们精致的加速度灵敏度。 (C)2020 年美国光学学会。
We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low-frequency gravity-sensitive inertial sensors show attainable acceleration noise floors on the order of 1 x 10(-11) m/s(2) root Hz. Furthermore, from our performance models, we devised an optimization approach for our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstrating mQ-products at levels of 250 kg, which highlight their exquisite acceleration sensitivity. (C)2020 Optical Society of America.