A Simple Metric for Determining Resolution in Optical, Ion, and Electron Microscope Images
A Simple Metric for Determining Resolution in Optical, Ion, and Electron Microscope Images
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DOI：
10.1017/s1431927615000343
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发表时间：
2015-06-01
影响因子：
2.8
通讯作者：
Sanders, Aric W.
中科院分区：
文献类型：
--
作者：
Curtin, Alexandra E.;Skinner, Ryan;Sanders, Aric W.
提出了一种用于任意空间校准图像分辨率分析的分辨率度量。通过将简单的S形函数拟合到垂直于亮-暗边缘拍摄的图像的切片上的像素强度，可以确定发生亮-暗过渡的平均距离。然后将该特征距离的固定倍数报告为图像分辨率。通过对Si的扫描透射电子显微镜高角环形暗场像的分析，确定了前因子。这个度量已被应用到光学，扫描电子显微镜，和氦离子显微镜图像。该方法提供关于图像分辨率的定量反馈，与收集数据的工具无关。此外，我们的分析提供了一个非任意和自洽的框架，任何最终用户都可以利用它来评估使用相同度量的任何供应商的多个显微镜的分辨率。
A resolution metric intended for resolution analysis of arbitrary spatially calibrated images is presented. By fitting a simple sigmoidal function to pixel intensities across slices of an image taken perpendicular to light-dark edges, the mean distance over which the light-dark transition occurs can be determined. A fixed multiple of this characteristic distance is then reported as the image resolution. The prefactor is determined by analysis of scanning transmission electron microscope high-angle annular dark field images of Si. This metric has been applied to optical, scanning electron microscope, and helium ion microscope images. This method provides quantitative feedback about image resolution, independent of the tool on which the data were collected. In addition, our analysis provides a nonarbitrary and self-consistent framework that any end user can utilize to evaluate the resolution of multiple microscopes from any vendor using the same metric.