Silicon photonic wavelength cross-connect with integrated MEMS switching
Silicon photonic wavelength cross-connect with integrated MEMS switching
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DOI：
10.1063/1.5120063
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发表时间：
2019-10
期刊：
影响因子：
5.6
通讯作者：
T. J. Seok;Jianheng Luo;Zhilei Huang;Kyungmok Kwon;Johannes Henriksson;John Jacobs;Lane Ochikubo;R. Muller;Ming C. Wu
中科院分区：
文献类型：
--
作者：
T. J. Seok;Jianheng Luo;Zhilei Huang;Kyungmok Kwon;Johannes Henriksson;John Jacobs;Lane Ochikubo;R. Muller;Ming C. Wu
我们报告了带有集成微机电系统 (MEMS) 执行器的增强型硅光子平台上的单片集成波长交叉连接 (WXC)。具有 8 个波长通道的 8 × 8 WXC，包括 16 个中阶梯光栅和 512 个硅光子 MEMS 开关，集成在 9.7 mm × 6.7 mm 硅芯片上。 WXC继承了硅光子MEMS空间开关的基本优势，包括低损耗、宽光学带宽、大制造公差和简单的数字控制。 WXC 具有 -30 dB 的低串扰、0.7 µs 的亚微秒切换时间以及 8.8 dB 至 16.4 dB 的片上光学插入损耗。据我们所知，这是迄今为止报道的最大通道容量（64 个通道 = 8 端口 × 8 波长）集成 WXC。我们报告了具有集成微机电系统 (MEMS) 执行器的增强型硅光子平台上的单片集成波长交叉连接 (WXC)。具有 8 个波长通道的 8 × 8 WXC，包括 16 个中阶梯光栅和 512 个硅光子 MEMS 开关，集成在 9.7 mm × 6.7 mm 硅芯片上。 WXC继承了硅光子MEMS空间开关的基本优势，包括低损耗、宽光学带宽、大制造公差和简单的数字控制。 WXC 具有 -30 dB 的低串扰、0.7 µs 的亚微秒切换时间以及 8.8 dB 至 16.4 dB 的片上光学插入损耗。据我们所知，这是迄今为止报道的最大通道容量（64 个通道 = 8 端口 × 8 波长）集成 WXC。
We report on monolithically integrated wavelength cross-connects (WXCs) on an enhanced silicon photonic platform with integrated micro-electro-mechanical-system (MEMS) actuators. An 8 × 8 WXC with 8 wavelength channels comprising 16 echelle gratings and 512 silicon photonic MEMS switches is integrated on a 9.7 mm × 6.7 mm silicon chip. The WXC inherits the fundamental advantages of silicon photonic MEMS space switches, including low loss, broad optical bandwidth, large fabrication tolerance, and simple digital control. The WXC exhibits a low crosstalk of −30 dB, a submicrosecond switching time of 0.7 µs, and on-chip optical insertion losses varying from 8.8 dB to 16.4 dB. To our knowledge, it is the largest channel capacity (64 channels = 8 ports × 8 wavelengths) integrated WXC ever reported.We report on monolithically integrated wavelength cross-connects (WXCs) on an enhanced silicon photonic platform with integrated micro-electro-mechanical-system (MEMS) actuators. An 8 × 8 WXC with 8 wavelength channels comprising 16 echelle gratings and 512 silicon photonic MEMS switches is integrated on a 9.7 mm × 6.7 mm silicon chip. The WXC inherits the fundamental advantages of silicon photonic MEMS space switches, including low loss, broad optical bandwidth, large fabrication tolerance, and simple digital control. The WXC exhibits a low crosstalk of −30 dB, a submicrosecond switching time of 0.7 µs, and on-chip optical insertion losses varying from 8.8 dB to 16.4 dB. To our knowledge, it is the largest channel capacity (64 channels = 8 ports × 8 wavelengths) integrated WXC ever reported.