Theory of terraced topographies produced by oblique-incidence ion bombardment of solid surfaces

Theory of terraced topographies produced by oblique-incidence ion bombardment of solid surfaces
复制标题

斜入射离子轰击固体表面产生梯田形貌的理论

DOI:
--
复制
发表时间:
2015
期刊:
Journal of Physics: Condensed Matter
影响因子:
--
通讯作者:
R. M. Bradley
R. M. Bradley
中科院分区:
--
文献类型:
--
作者:
D. A. Pearson;R. M. Bradley

文献摘要

参考文献

被引文献

相似文献

当固体表面受到宽离子束以相对大的入射角轰击时,表面通常会形成阶梯状。我们引入了一个模型,该模型包括改进的溅射产率近似值,并且可以在很宽的参数值范围内长时间产生阶梯状表面形态。我们的运动方程的数值积分表明,梯田随着时间的推移而变粗,正如实验观察到的那样。我们还表明,随着表面扰动幅度的增加,平台传播方向可能会反转。这凸显了高阶非线性在确定高通量下的传播速度方面发挥的重要作用。
When a solid surface is bombarded with a broad ion beam at a relatively large angle of incidence, the surface often develops a terraced form. We introduce a model that includes an improved approximation to the sputter yield and that produces a terraced surface morphology at long times for a wide range of parameter values. Numerical integrations of our equation of motion reveal that the terraces coarsen as time passes, just as observed experimentally. We also show that the terrace propagation direction can reverse as the amplitude of the surface disturbance grows. This highlights the important role higher order nonlinearities play in determining the propagation velocity at high fluences.
DOI: 10.1016/j.nimb.2012.05.028
发表时间: 2012-08
影响因子: 1.3
作者:
H. Gnaser;B. Reuscher;A. Zeuner
通讯作者: H. Gnaser;B. Reuscher;A. Zeuner