Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil
Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil
复制标题
退火对基于市售铝箔的柔性 ZnO 声波传感器的结构、功能和器件性能的影响
DOI：
10.1109/ted.2016.2610466
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发表时间：
2016-11-01
影响因子：
3.1
通讯作者：
Fu, Yong Qing
中科院分区：
文献类型：
--
作者：
Liu, Yong;Luo, Jing Ting;Fu, Yong Qing
本文报道了在柔性箔衬底上对氧化锌（ZnO）薄膜进行退火处理，以提高其功能和声波传感性能。采用磁控溅射技术将厚度为5 μ m的ZnO薄膜沉积在厚度为50 μ m的铝箔上，然后在300 ~ 500℃的不同温度下进行空气退火，研究了后退火对ZnO薄膜和ZnO/Al箔声波器件的结构、光学和器件性能的影响。350℃为最佳退火温度，可获得良好的透光性，提高结晶度，减少薄膜应力/缺陷，提高兰姆波和瑞利波反射信号的振幅。退火后的ZnO/Al声波器件具有较大的频率温度系数和良好的线性度，显示了精确温度传感的潜力。
This paper reports post-annealing of zinc oxide (ZnO) films on flexible foil substrates in order to improve the functional and acoustic wave sensing performance. ZnO films of 5 mu m thick were deposited onto aluminum foils (50 mu m thick) using magnetron sputtering and then annealed in air at different temperatures between 300 degrees C and 500 degrees C. Effects of postannealing on structural, optical, and device properties of the ZnO films and ZnO/Al foil acoustic wave devices were investigated. A temperature of 350 degrees C was identified as the optimized annealing temperature, which resulted in good light transmission, improved crystallinity, reduced film stress/defects, and increased amplitude of reflection signals of both Lamb and Rayleigh waves. The annealed ZnO/Al acoustic wave devices demonstrated a large temperature coefficient of frequency and a good linearity, revealing the potential for precise temperature sensing.