A dual-stage control system for high-speed, ultra-precise linear motion
A dual-stage control system for high-speed, ultra-precise linear motion
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DOI：
10.1007/s00170-009-2327-x
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发表时间：
2010-05
期刊：
影响因子：
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通讯作者：
Yixu Song;Jianfa Wang;Kaiming Yang;Wensheng Yin;Yu Zhu
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文献类型：
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作者：
Yixu Song;Jianfa Wang;Kaiming Yang;Wensheng Yin;Yu Zhu
现代制造设备往往需要高速和超精密的直线运动。为了实现这种运动，粗-精双级是有效的，因为粗级具有低带宽和大工作空间，而相比之下，精级具有高带宽和小行程。本文介绍了一种气浮双级系统的实现及其控制策略。采用绝对空间的闭环反馈实现粗-精控制。精密工作台由一个音圈电机驱动，它跟踪设计的轨迹，而粗动工作台由永磁直线同步电机驱动，它跟踪精密工作台的轨迹，以防止其运动饱和。分析了直接驱动电机驱动气浮双级的耦合动力学。详细介绍了精动平台的辨识和鲁棒控制设计。对单台精密工作台进行了方法试验，结果表明该方法可以实现精密工作台的超精密控制。接下来，使用不同的负载的双级的实验。实验结果表明，该控制策略可以实现双工作台的高速、超精密直线运动，具有令人满意的性能。
Modern manufacturing equipment often requires high-speed and ultra-precise linear motion. For implementing such motion, a coarse–fine dual stage is effective because the coarse stage has a low bandwidth with a large workspace, and in contrast, the fine stage has a high bandwidth with a small stroke. This paper presents the implementation of an air-bearing, dual-stage system and its control strategy. A closed-loop feedback in an absolute space is used to realize coarse–fine control. The fine stage is driven by a voice coil motor that tracks the designed trajectory, while the coarse stage is driven by permanent-magnet linear synchronous motor that tracks the trajectory of the fine stage to prevent its motion saturation. Also analyzed are the coupled dynamics of the air-bearing dual stage driven by a direct-drive motor. Identification and robust control design for the fine stage are introduced in detail. Method tests for the single fine stage are performed, and the results demonstrate that ultra-precision control can be realized for the fine stage. Next, experiments are presented with the dual stage using different loads. Experimental results show that our control strategy can achieve high-speed, ultra-precision linear motion through the dual stage with a satisfactory performance.