The use of voltage to accelerate the endurance degradation of PZT capacitors
The use of voltage to accelerate the endurance degradation of PZT capacitors
复制标题
利用电压加速PZT电容器的耐久性退化
DOI：
10.1080/10584589708013044
复制
发表时间：
1997
影响因子：
0.7
通讯作者：
D. Dalton
中科院分区：
文献类型：
--
作者：
T. D. Hadnagy;S. Traynor;D. Dalton
摘要建立了3 ~ 8伏特电压下PZT的耐久性能预测模型。作为成品晶圆上的街道结构的一部分的电容器循环周期从10次增加到总共12次。为了建立模型来预测1e15次循环的性能，对开关电荷进行了10到12个数量级的测量。研究发现，开关电荷作为疲劳循环次数对数的平方函数而衰减。该模型拟合数据的r2大于0.95。利用感应放大器的最小允许电荷，该模型可用于预测工作电压下的零件寿命。
Abstract A voltage vs. endurance model was created to predict the performance of PZT from 3 to 8 volts. Capacitors that are part of the street structure on finished wafer products were cycled from 10 to a total of le 12 cycles. The switched charge was measured over 10 to 12 orders of magnitude in order to develop models to predict performance out to 1e15 cycles. The switched charge was found to degrade as a square function of the log of the number of cycles fatigued. The model was found to fit the data with an r2 greater than .95. Utilizing the minimum allowable charge for a sense amplifier, this model could be used to predict part life over operating voltages.