J.Dutta K.Hasezaki S.Msashima P.J.McElheny A.Suzuki G.Ganguly A.Matsuda: "Effect of ion bombardment on the properities of hydrogenated amorphous silicon prepared from undiluted and xenon-diluted silane" Jpn.J.Appl.Phys. 31. L299-L302 (1992)
J.Dutta K.Hasezaki S.Msashima P.J.McElheny A.Suzuki G.Ganguly A.Matsuda: "Effect of ion bombardment on the properities of hydrogenated amorphous silicon prepared from undiluted and xenon-diluted silane" Jpn.J.Appl.Phys. 31. L299-L302 (1992)
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J.Dutta K.Hasezaki S.Msashima P.J.McElheny A.Suzuki G.Ganguly A.Matsuda：“离子轰击对未稀释和氙稀释硅烷制备的氢化非晶硅性能的影响”Jpn.J.Appl.Phys。
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