Fabrication and Testing of a High-Speed Microscale Turbocharger
Fabrication and Testing of a High-Speed Microscale Turbocharger
复制标题
高速微型涡轮增压器的制造和测试
DOI：
10.1109/jmems.2008.924257
复制
发表时间：
2008
影响因子：
2.7
通讯作者：
A. Epstein
中科院分区：
文献类型：
--
作者：
N. Savoulides;S. Jacobson;Hanqing Li;L. Ho;R. Khanna;C. Teo;J. Protz;L. xilinx Wang;D. Ward;M. Schmidt;A. Epstein
作为麻省理工学院项目的一部分，微机电系统 (MEMS) 涡轮增压器已被设计、制造和测试，该项目旨在生产用于便携式电源应用的微制造燃气涡轮发动机。燃气涡轮发动机需要以每秒数百米的叶尖速度运行的高速高效涡轮机械。这款 MEMS 涡轮增压器可以证明这些要求。涡轮增压器的硅转子由硅定子外壳中的静压气体推力轴承和轴颈轴承支撑，转速达到 480 000 rpm，对应的叶尖速度为 200 m/s。本文讨论了实现该设备功能的关键制造工艺。还介绍了操作问题和测试结果。涡轮增压器的压缩机在质量流量为 0.13 g/s 时表现出 1.21 的压力比，压缩机-涡轮轴的组合效率为 0.24。在这些条件下，涡轮机产生约 5 W 的功率。还介绍了微型涡轮增压器内旋转转子和燃烧室同时运行的结果。实验结果与分析模型和计算结果吻合良好。
A microelectromechanical system (MEMS) turbocharger has been designed, fabricated, and tested as part of a Massachusetts Institute of Technology program aimed at producing a microfabricated gas turbine engine for portable power applications. A gas turbine engine requires high-speed high-efficiency turbomachinery operating at tip speeds of several hundred meters per second. This MEMS turbocharger serves to demonstrate these requirements. The turbocharger's silicon rotor, which is supported on hydrostatic gas thrust and journal bearings in a silicon stator housing, was spun to 480 000 rpm, corresponding to a tip speed of 200 m/s. This paper discusses critical fabrication processes that enabled the capabilities of this device. Operational issues and test results are also presented. The turbocharger's compressor demonstrated a pressure ratio of 1.21 at a mass flow rate of 0.13 g/s, with a combined compressor-turbine spool efficiency of 0.24. Under these conditions, the turbine produced about 5 W of power. Results from the simultaneous operation of a spinning rotor and burning combustor within the microscale turbocharger are also presented. Experimental results compare well with analytical models and computations.