Fast fabrication of long-range ordered porous alumina membranes by hard anodization
Fast fabrication of long-range ordered porous alumina membranes by hard anodization
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DOI：
10.1038/nmat1717
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发表时间：
2006-09-01
期刊：
影响因子：
41.2
通讯作者：
Nielsch, Kornelius
中科院分区：
文献类型：
--
作者：
Lee, Woo;Ji, Ran;Nielsch, Kornelius
纳米多孔阳极氧化铝已被广泛应用于各种功能纳米结构的开发。到目前为止，这些自组织的孔结构只能在狭窄的加工条件下制备。本文报道了一种基于草酸的远距离有序氧化铝膜阳极氧化新工艺。该工艺是新一代所谓的“硬阳极氧化”方法，自20世纪60年代以来，该方法已广泛用于工业中高速制造机械坚固，非常厚（bbb100 μ m）和低孔隙率的氧化铝薄膜。这种硬阳极氧化方法建立了一种新的自有序体系，其孔间距离(D-int) = 200-300 nm，这是迄今为止温和阳极氧化工艺尚未实现的。在处理时间方面，它比传统的阳极氧化工艺有很大的优势，可以使氧化物生长速度提高2500 - 3500 %，并改善纳米孔的有序性。完美有序的氧化铝膜具有高纵横比（bbb1000）均匀的纳米孔直径周期性调制。
Nanoporous anodic aluminium oxide has been widely used for the development of various functional nanostructures. So far these self-organized pore structures could only be prepared within narrow processing conditions. Here we report a new oxalic-acid-based anodization process for long-range ordered alumina membranes. This process is a new generation of the so-called 'hard anodization' approach that has been widely used in industry for high-speed fabrication of mechanically robust, very thick (> 100 mu m) and low-porosity alumina films since the 1960s. This hard anodization approach establishes a new self-ordering regime with interpore distances, (D-int) = 200-300 nm, which have not been achieved by mild anodization processes so far. It offers substantial advantages over conventional anodization processes in terms of processing time, allowing 2,500-3,500% faster oxide growth with improved ordering of the nanopores. Perfectly ordered alumina membranes with high aspect ratios (> 1,000) of uniform nanopores with periodically modulated diameters have been realized.