Spectroscopic analysis of a-C and a-CNx films prepared by ultrafast high repetition rate pulsed laser deposition
Spectroscopic analysis of a-C and a-CNx films prepared by ultrafast high repetition rate pulsed laser deposition
复制标题
DOI：
10.1063/1.1874300
复制
发表时间：
2005-03
影响因子：
3.2
通讯作者：
R. McCann;S. Roy;P. Papakonstantinou;J. McLaughlin;S. Ray
中科院分区：
文献类型：
--
作者：
R. McCann;S. Roy;P. Papakonstantinou;J. McLaughlin;S. Ray
研究了氮分压对非晶氮化碳（a-CNx）（0.0 × 10 ~（-17））和激光能量密度对超快高重复频率脉冲激光沉积非晶碳（a-C）薄膜的影响。通过X射线光电子能谱（XPS）、拉曼光谱和傅里叶变换红外光谱（FTIR）分析研究了薄膜的化学键结构。XPS研究的薄膜揭示了增加的CN网站在CC键合的碳网站的费用，在薄膜中的氮含量增加。作为激光能量密度的函数制备的膜（a-C）显示随着激光能量密度从0.36 J scincm 2增加到1.7J scincm 2，sp3键合的碳增加。ID IG比和G峰位置作为氮的函数增加，而G峰的半高全宽（FWHM）降低。这表明sp2站点的大小或数量增加。作为激光能量密度的函数制备的膜揭示了ID IG比的降低和FWH的增加。
The effect of nitrogen partial pressure on amorphous carbon nitride (a-CNx) (0.0⩽x⩽0.17) and laser fluence on amorphous carbon (a-C) films prepared by ultrafast high repetition rate pulsed laser deposition has been studied. The chemical bonding structure of the films was investigated by x-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and Fourier transform infrared (FTIR) analysis. XPS studies of films revealed an increase in the CN sites at the expense of CC bonded carbon sites as nitrogen content in the films increased. Films (a-C) prepared as a function of laser fluence showed an increase in sp3-bonded carbon as laser fluence was increased from 0.36 to 1.7J∕cm2. The ID∕IG ratio and G peak position increased as a function of nitrogen whereas the full width at half maximum (FWHM) of the G peak decreased. This is indicative of either an increase in the size or number of the sp2 sites. Films prepared as a function of laser fluence revealed a decrease of the ID∕IG ratio and an increase in the FWH...