Single-crystal diamond tools formed using a focused ion beam: Tool life enhancement via heat treatment
Single-crystal diamond tools formed using a focused ion beam: Tool life enhancement via heat treatment
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DOI：
10.1016/j.diamond.2014.07.013
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发表时间：
2014-10-01
影响因子：
4.1
通讯作者：
Sasaoka, Hideki
中科院分区：
文献类型：
--
作者：
Kawasegi, Noritaka;Ozaki, Kazuma;Sasaoka, Hideki
我们描述了一种改进用于纳米和微米级加工并通过聚焦离子束（FIB）微加工形成的金刚石切割工具的技术。虽然FIB照射是一种有效的手段，制造任意微型形状的金刚石刀具，FIB照射诱导非金刚石相，以及Ga离子注入，在照射区域。这对超精密加工工艺的性能产生不利影响，特别是在刀具寿命和加工表面质量方面。为了消除受影响的层，我们采用热处理技术，并研究了最佳的热分布。施加到切削工具的500摄氏度的温度提供了镍磷的最佳加工。刀具寿命显著提高，并获得了类似于未辐照金刚石刀具的刀具寿命。加工表面的质量也得到了显着改善，由于优越的上级刀具磨损和粘附阻力。(C)2014爱思唯尔有限公司版权所有。
We describe a technique to improve diamond cutting tools used in nanometer- and micrometer-scale machining and formed via focused-ion-beam (FIB) micromachining. Although FIB irradiation is an effective means of fabricating arbitrary miniature shapes in diamond cutting tools, FIB irradiation induces a non-diamond phase, as well as Ga ion implantation, in the irradiated area. This adversely affects the performance of the ultra-precision machining process, especially in terms of tool life and the quality of the machined surface. To eliminate the affected layer, we applied heat-treatment techniques and investigated the optimum thermal profiles. A temperature of 500 degrees C applied to the cutting tool provided optimal machining of nickel phosphorus. The tool life was significantly improved, and a tool life similar to that of a non-irradiated diamond tool was obtained. The quality of the machined surface was also improved markedly owing to superior tool wear and adhesion resistance. (C) 2014 Elsevier B.V. All rights reserved.