Investigation of corrosion phenomena on chemical microsensors
Investigation of corrosion phenomena on chemical microsensors
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DOI：
10.1016/s0013-4686(01)00545-x
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发表时间：
2001-09-01
影响因子：
6.6
通讯作者：
Vonau, W
中科院分区：
文献类型：
--
作者：
Guth, U;Oelssner, W;Vonau, W
与正常尺寸的传感器相比，化学微传感器暴露于更高的腐蚀风险。腐蚀损坏可能由测量介质对化学敏感层的直接攻击以及由于封装材料吸收或渗透水分而导致的基板材料或电触点的腐蚀引起。化学传感器上的腐蚀现象已经通过使用电化学方法（如电极电位和传感器输出信号的测量或电化学噪声的测量）、通过电阻和阻抗测量以及通过重量法和通过测试下的试样的显微镜或REM观察来研究。本文介绍并讨论了利用上述方法对pH玻璃电极、ISFET pH传感器、基于双金属氧化物的氧传感器和基于氧化锆的电位型气体传感器的腐蚀测量结果。(C)2001爱思唯尔科技有限公司版权所有。
Compared to normally sized sensors, chemical microsensors are exposed to a higher corrosion risk. Corrosive damage can be caused by both the direct attack of the measuring medium on the chemically sensitive layer and the corrosion of the substrate materials or the electrical contacts due to absorption or penetration of moisture through the encapsulating material. Corrosion phenomena on chemical sensors have been investigated by using electrochemical methods like the measurement of electrode potentials and sensor output signals or the measurement of the electrochemical noise, by resistance and impedance measurements as well as by gravimetric methods and by microscopic or REM observation of the specimen under test. In the paper, results of corrosion measurements on pH glass electrodes, ISFET pH sensors, semiconductor-based miniaturised oxygen sensors and zirconia-based potentiometric gas sensors by utilising the above listed methods are presented and discussed. (C) 2001 Elsevier Science Ltd. All rights reserved.