Sensitivity-improved silicon cantilever microphone for acousto-optical detection
Sensitivity-improved silicon cantilever microphone for acousto-optical detection
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DOI：
10.1016/j.sna.2012.11.020
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发表时间：
2013-02
影响因子：
4.6
通讯作者：
P. Sievilä;N. Chekurov;J. Raittila;I. Tittonen
中科院分区：
文献类型：
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作者：
P. Sievilä;N. Chekurov;J. Raittila;I. Tittonen
硅悬臂梁传感器已在声波检测中进行了设计、制造和测试。这些组件的主要应用是光声光谱 (PAS)，它是固体、液体和气体分析中的一种高灵敏度方法。所开发的传感器微加工工艺基于绝缘体上硅 (SOI) 晶圆蚀刻，其中的挑战是控制和最小化薄 (5μm) 但大面积 (几 mm2) 组件中与弯曲相关的残余应力。在固体样品的光声测量中研究了所制造的悬臂梁的灵敏度，与之前报道的悬臂麦克风获得的结果相比，信号强度增加了百分之几十。信噪比（SNR）的提高验证了所提出的悬臂梁在光声传感中的优势。
Silicon cantilever sensors have been designed, fabricated and tested in acoustic wave detection. The principal application of the components is photoacoustic spectroscopy (PAS) which is a highly sensitive method in solid, liquid and gas analysis. The developed microfabrication process of the sensors is based on silicon-on-insulator (SOI) wafer etching, in which the challenge is to control and minimize the residual stress related curving in thin (5μm) but large-area (few mm2) components. The sensitivity of the fabricated cantilevers is investigated in photoacoustic measurements of solid samples, and the signal strength is shown to increase tens of percent compared with the results obtained with previously reported cantilever microphones. Improvement of the signal-to-noise ratio (SNR) verifies the advantage of the presented cantilevers in photoacoustic sensing.