Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources
Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources
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DOI：
10.1063/1.3526383
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发表时间：
2010-12
影响因子：
4
通讯作者：
T. Otsuka;D. Kilbane;T. Higashiguchi;N. Yugami;T. Yatagai;Weihua Jiang;A. Endo;P. Dunne;G. O’Sullivan
中科院分区：
文献类型：
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作者：
T. Otsuka;D. Kilbane;T. Higashiguchi;N. Yugami;T. Yatagai;Weihua Jiang;A. Endo;P. Dunne;G. O’Sullivan
本文研究了峰值为6.7 nm的稀土等离子体极紫外光源的光谱行为和转换效率与激光波长和初始目标密度的关系。当激光强度为1.6×1012 W/cm2，工作波长为1064 nm时，低初始密度靶降低了自吸收，最大转换效率为1.3%。此外，较低的密度导致较窄的光谱，从而提高了光谱纯度。当使用高z目标时，使用低初始密度目标和/或产生低电子密度等离子体对于有效的极紫外源是重要的。
We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion efficiency was 1.3% at a laser intensity of 1.6×1012 W/cm2 at an operating wavelength of 1064 nm, when self-absorption was reduced by use of a low initial density target. Moreover, the lower-density results in a narrower spectrum and therefore improved spectral purity. It is shown to be important to use a low initial density target and/or to produce low electron density plasmas for efficient extreme ultraviolet sources when using high-Z targets.