Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
Fabrication of Thin Sensitive Film of Ball Surface Acoustic Wave Sensor by Off-Axis Spin-Coating Method
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DOI：
10.1143/jjap.48.07gg13
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发表时间：
2009-07
影响因子：
1.5
通讯作者：
Kentaro Kobari;Yutaro Yamamoto;M. Sakuma;S. Akao;T. Tsuji;K. Yamanaka
中科院分区：
文献类型：
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作者：
Kentaro Kobari;Yutaro Yamamoto;M. Sakuma;S. Akao;T. Tsuji;K. Yamanaka
在环境评估和安全中，需要检测低浓度的有害气体。当实现 SAW 的超多次往返（例如，>100 圈）时，球表面声波 (SAW) 传感器的灵敏度可以显着提高。然而，传统旋涂方法制备的有机敏感膜又厚又粗糙，阻碍了它的发展。我们提出了一种“离轴旋涂法”，以制造薄且高度均匀且具有高再现性的有机敏感薄膜。 Langasite球声表面波传感器涂有聚异戊二烯、聚异丁烯和聚二甲基硅氧烷敏感膜，用于检测普通饱和烃（戊烷、己烷、庚烷、辛烷和壬烷）、神经毒气模拟物（甲基膦酸二甲酯：DMMP）和病态气体（苯、甲苯和二甲苯）。通过所提出的方法，我们成功地实现了多次往返，并在无需对样品进行初步冷凝的情况下检测了亚 ppm 浓度的 DMMP。
In environmental assessment and security, it is necessary to detect hazardous gases at low concentrations. The ball surface acoustic wave (SAW) sensor can have significantly improved sensitivity when the ultramultiple roundtrips (e.g., >100 turns) of the SAW is achieved. However, it is hindered by the thick and coarse organic sensitive film fabricated by the conventional spin-coating method. We propose an “off-axis spin coating method” in order to fabricate thin and highly uniform organic sensitive film with high reproducibility. Langasite ball SAW sensors were coated by polyisoprene, polyisobutylene, and polydimethylsiloxane sensitive films and were applied in detecting normal saturated hydrocarbons (pentane, hexane, heptane, octane, and nonane), a nerve gas simulant (dimethyl methylphosphonate: DMMP), and sick-house gases (benzene, toluene, and xylene). With the proposed method, we succeeded in realizing multiple roundtrips and in detecting DMMP at a sub-ppm concentration without preliminary condensation of the sample.