Preparation of nano-structured BaTiO3 thin film by electrophoretic deposition and its characterization
Preparation of nano-structured BaTiO3 thin film by electrophoretic deposition and its characterization
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DOI：
10.1016/j.jeurceramsoc.2005.03.008
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发表时间：
2005
影响因子：
5.7
通讯作者：
Y. J. Wu;J. Li;H. Tanaka;M. Kuwabara
中科院分区：
文献类型：
--
作者：
Y. J. Wu;J. Li;H. Tanaka;M. Kuwabara
纳米结构 BaTiO3(BTO) 薄膜是从 BTO 纳米粒子悬浮液中电泳沉积而成。通过 XRD、HR-TEM 和 SEM 技术检查了纳米颗粒和薄膜的微观结构特性。采用高浓度溶胶-凝胶法合成了平均粒径约为 10 nm 的准立方钙钛矿相 BTO 纳米晶。将一块BTO块状凝胶分散到2-甲氧基乙醛和乙酰丙酮的混合溶剂中，得到分散良好且稳定的BTO纳米晶悬浮液。利用这些悬浮液，通过电泳沉积 (EPD) 在 Pt/Ti/SiO2/Si 基底上沉积厚度从 100 nm 到几微米的无裂纹纳米结构 BTO 薄膜。制备的薄膜具有均匀的纳米结构和光滑的表面，粗糙度在10nm以下。评估了烧结 BTO 薄膜的微观结构和介电性能。
Nano-structured BaTiO3(BTO) thin films were electrophoretically deposited from BTO nanoparticle suspensions. The microstructural properties of the nanoparticles and thin films were examined through XRD, HR-TEM, and SEM techniques. BTO nanocrystallites in a pseudo-cubic perovskite phase with an average particle size of about 10nm were synthesized by a high-concentration sol–gel process. By dispersing a piece of BTO bulk gel into a mixed solvent of 2-methoxyethonal and acetylacetone, the well-dispersed and stable suspensions of BTO nanocrystallites were obtained. From these suspensions, crack-free nano-structured BTO thin films with different thickness from 100nm to several micrometers were deposited on Pt/Ti/SiO2/Si substrates by electrophoretic deposition (EPD). The prepared films exhibited a uniform nanostructure, and a smooth surface with a roughness under 10nm. The microstructural and dielectric properties of sintered BTO thin films were evaluated.