Near- and Far-Field Observation of Phonon Polaritons in Wafer-Scale Multilayer Hexagonal Boron Nitride Prepared by Chemical Vapor Deposition.
Near- and Far-Field Observation of Phonon Polaritons in Wafer-Scale Multilayer Hexagonal Boron Nitride Prepared by Chemical Vapor Deposition.
复制标题
化学气相沉积制备的晶圆级多层六方氮化硼中声子极化子的近场和远场观察。
DOI：
10.1002/adma.202302045
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发表时间：
2023
期刊：
影响因子：
--
通讯作者：
Calandrini E
中科院分区：
文献类型：
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作者：
Calandrini E
层状材料中的极化激元是在纳米尺度上操纵和控制光的一个很有前途的平台。因此，在晶圆级LM中观察极化激元对于工业相关纳米光子学和光电子学应用的发展至关重要。在这项工作中，声子极化激元（PhPs）的晶片级多层六方氮化硼（hBN）生长的化学气相沉积的报告。通过红外纳米成像，可视化的PhPs，和PhP的寿命为100.6 ps的测量，可与微机械剥离的多层hBN。此外，PhP纳米谐振器被证明。它们的品质因数为1050，是基于剥离hBN的最新设备的约0.7倍。这些结果可以使基于PhP的表面增强红外光谱（例如，用于气体传感）和红外光电探测器应用。
Polaritons in layered materials (LMs) are a promising platform to manipulate and control light at the nanometer scale. Thus, the observation of polaritons in wafer‐scale LMs is critically important for the development of industrially relevant nanophotonics and optoelectronics applications. In this work, phonon polaritons (PhPs) in wafer‐scale multilayer hexagonal boron nitride (hBN) grown by chemical vapor deposition are reported. By infrared nanoimaging, the PhPs are visualized, and PhP lifetimes of ≈0.6 ps are measured, comparable to that of micromechanically exfoliated multilayer hBN. Further, PhP nanoresonators are demonstrated. Their quality factors of ≈50 are about 0.7 times that of state‐of‐the‐art devices based on exfoliated hBN. These results can enable PhP‐based surface‐enhanced infrared spectroscopy (e.g., for gas sensing) and infrared photodetector applications.