Thermal expansion characterization of thin films using harmonic Joule heating combined with atomic force microscopy
Thermal expansion characterization of thin films using harmonic Joule heating combined with atomic force microscopy
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DOI：
10.1063/5.0049160
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发表时间：
2021-05
影响因子：
4
通讯作者：
Settasit Chaikasetsin;T. Kodama;K. Bae;Jun-Young Jung;Jeeyoung Shin;B. Lee;Brian S. Y. Kim;Jung-Joo Seo;U. Sim;F. Prinz;K. Goodson;Woosung Park
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作者：
Settasit Chaikasetsin;T. Kodama;K. Bae;Jun-Young Jung;Jeeyoung Shin;B. Lee;Brian S. Y. Kim;Jung-Joo Seo;U. Sim;F. Prinz;K. Goodson;Woosung Park
表征薄膜的热膨胀系数（CTE）通常是具有挑战性的，因为实验信号随着厚度的减小而逐渐减小。在这里，我们提出了一种方法来测量热膨胀系数的薄膜局部限制使用谐波焦耳加热的有效热体积。重要的是，我们同时探测谐波膨胀在原子尺度的厚度分辨率使用原子力显微镜。我们使用的光刻图案化的薄膜上的差分方法来隔离的地形和谐波的薄膜的热膨胀的贡献。基于测得的热膨胀，我们使用数值模拟来提取CTE考虑从相邻层引起的应力。我们使用聚甲基丙烯酸甲酯演示了我们的方法，测得的CTE为55.0 × 10−6 ± 6.4 × 10−6 K−1，与以前的工作一致。这项工作铺平了道路，在许多材料系统，包括有机和无机介质的热机械特性的调查。
Characterizing coefficient of thermal expansion (CTE) for thin films is often challenging as the experimental signal is asymptotically reduced with decreasing thickness. Here, we present a method to measure CTE of thin films by locally confining an active thermal volume using harmonic Joule heating. Importantly, we simultaneously probe the harmonic expansion at atomic-scale thickness resolution using atomic force microscopy. We use a differential method on lithographically patterned thin films to isolate the topographical and harmonic thermal expansion contributions of the thin films. Based on the measured thermal expansion, we use numerical simulations to extract the CTE considering the stress induced from neighboring layers. We demonstrate our method using poly(methyl methacrylate), and the measured CTE of 55.0 × 10−6 ± 6.4 × 10−6 K−1 shows agreement with previous works. This work paves an avenue for investigating thermo-mechanical characterization in numerous materials systems, including both organic and inorganic media.