Determination of elastic modulus of thin layers using nanoindentation
Determination of elastic modulus of thin layers using nanoindentation
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DOI：
10.1557/jmr.1997.0327
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发表时间：
1997-09-01
影响因子：
2.7
通讯作者：
Swain, MV
中科院分区：
文献类型：
--
作者：
Mencik, J;Munz, D;Swain, MV
通过将样品压入不同的深度，并将测量的(表观)E值外推到零渗透，可以确定均匀薄膜的弹性模数。本文介绍了五种逼近函数在这方面的应用：线性函数、指数函数、倒数指数函数、高氏函数、Doerner函数和Nix函数。26种薄膜/基片组合的结果比较表明，薄膜/基片复合材料的压痕响应一般可以用GaO解析函数来描述。在由实验数据确定薄膜模数时，指数函数也能得到满意的结果，而线性函数只适用于相对穿透深度较小的厚膜。文章解释了相关的程序，并为测试提供了切实可行的建议。
Elastic modulus of thin homogeneous films can be determined by indenting the specimen to various depths and extrapolating the measured (apparent) E-values to zero penetration. The paper shows the application of five approximation functions for this purpose: linear, exponential, reciprocal exponential, Gao's, and the Doerner and Nix functions. Comparison of the results for 26 film/substrate combinations has shown that the indentation response of film/substrate composites can, in general, be described by the Gao analytical function. In determining the thin film modulus from experimental data, satisfactory results can also be obtained with the exponential function, while linear function may be used only for thick films where the relative depths of penetration are small. The article explains the pertinent procedures and gives practical recommendations for the testing.