Single and multi-channel Al-based multilayer systems for space applications in EUV range
Single and multi-channel Al-based multilayer systems for space applications in EUV range
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DOI：
10.1117/12.2017058
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发表时间：
2013-05
期刊：
影响因子：
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通讯作者：
E. Meltchakov;S. de Rossi;R. Mercier;F. Varnière;A. Jérôme;F. Auchère;X. Zhang;M. Roulliay;F. Delmotte
中科院分区：
文献类型：
--
作者：
E. Meltchakov;S. de Rossi;R. Mercier;F. Varnière;A. Jérôme;F. Auchère;X. Zhang;M. Roulliay;F. Delmotte
我们报告了在极紫外线（EUV）应用中，特别是在太阳物理中，以铝为低吸收材料的反射多层涂层的进一步发展。多层设计和沉积工艺的优化使我们能够生产出界面粗糙度相对较低的al基多层，并记录了17至40 nm范围内的EUV反射率。Al/Mo/SiC和Al/Mo/B4C三材料多层膜在17.5 nm处的峰值反射率为56%，在21 nm处为50%，在32 nm处为42%。在4年的时间里，我们观察到多层膜的光学参数具有良好的时间稳定性。此外，多层结构在空气中100℃退火数周后仍保持稳定。我们将讨论更复杂的铝基系统的光学性质，涉及多层涂层的设计，这些涂层可以反射多个波长，并在17到40 nm的光谱范围内拒绝其他波长。这种具有增强反射率和选择性的多通道系统将进一步提高极紫外太阳成像仪器的光学性能和紧凑性。我们将讨论用铝制造的单通道和多通道多层反射镜的设计、优化和制造的一般方面。我们将介绍基于Al/Mo/SiC和Al/Mo/B4C材料组合的多层涂层的EUV反射率的最新研究结果。铝基多层系统被建议作为光学涂层用于未来空间任务的极紫外望远镜和其他极紫外应用。
We report on further development of reflective multilayer coatings containing aluminum as low absorbing material for the extreme ultra-violet (EUV) applications, in particular for solar physics. Optimizations of the multilayer design and deposition process have allowed us to produce Al-based multilayers having relatively low interface roughness and record EUV reflectances in the range from 17 to 40 nm. The peak reflectance values of 56 % at 17.5 nm, 50 % at around 21 nm, and 42 % at 32 nm were achieved with new three-material multilayers Al/Mo/SiC and Al/Mo/B4C at near-normal incidence. We observe a good temporal stability of optical parameters of the multilayers over the period of 4 years. Moreover, the multilayer structure remains stable upon annealing at 100 °C in air during several weeks. We will discuss the optical properties of more complex Al-based systems with regard to the design of multilayer coatings that reflect more than one wavelength and reject some others within the spectral range from 17 to 40 nm. Such multichannel systems with enhanced reflectance and selectivity would provide a further advance in optical performance and compactness of EUV solar imaging instruments. We will discuss general aspects of design, optimization and fabrication of single- and multi-channel multilayer mirrors made with the use of aluminum. We will present recent results on the EUV reflectivity of multilayer coatings based on the Al/Mo/SiC and Al/Mo/B4C material combinations. Al-based multilayer systems are proposed as optical coatings in EUV telescopes of future space missions and in other EUV applications.