Normalized and Average Current Distributions on Unevenly Spaced Patterns
Normalized and Average Current Distributions on Unevenly Spaced Patterns
复制标题
DOI：
10.1149/1.2085666
复制
发表时间：
1991-03
影响因子：
3.9
通讯作者：
A. West;M. Matlosz;D. Landolt
中科院分区：
文献类型：
--
作者：
A. West;M. Matlosz;D. Landolt
在电化学蚀刻速率的空间变化预测了不均匀间距的图案线。提出了基于一次电流分布计算的两种模型。一个模型用于估计模式中单个线上的归一化电流分布。另一种模式基于边界积分方程，用于估计平均电流密度在线与线之间的分布
Spatial variations in electrochemical etch rate are predicted for an unevenly spaced pattern of lines. Two models, based on primary current distribution calculations, are presented. One model is used to estimate the normalized current distribution on an individual line of the pattern. The other mode, based on boundary integral equations, is used for an estimation of the distribution from line to line of the average current densities