Micro- and nanopatterned copper structures using directed self-assembly on templates fabricated from phase-separated mixed Langmuir-Blodgett films.
Micro- and nanopatterned copper structures using directed self-assembly on templates fabricated from phase-separated mixed Langmuir-Blodgett films.
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DOI：
10.1021/la800805r
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发表时间：
2008-07
期刊：
影响因子：
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通讯作者：
Satoshi Watanabe;Hideto Kimura;Takahiro Sato;H. Shibata;Fumitaka Sakamoto;R. Azumi;H. Sakai;M. Abe;M. Matsumoto
中科院分区：
文献类型：
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作者：
Satoshi Watanabe;Hideto Kimura;Takahiro Sato;H. Shibata;Fumitaka Sakamoto;R. Azumi;H. Sakai;M. Abe;M. Matsumoto
我们报道了一种通用的方法来限制金属薄膜在微米和纳米级，使用定向自组装在由相分离的混合朗缪尔-布洛杰特(LB)薄膜制备的模板上。通过调节LB膜中成膜分子之间的分子间相互作用以及改变膜的制备条件，如混合比、亚相温度和表面压力，可以调节混合LB膜的图案。我们利用图案化区域的表面自由能与硅烷偶联剂自组装单分子膜的表面自由能之间的差异，将图案化的LB膜作为模板，将金属限制在图案化区域内。Au纳米颗粒被限制在图案化的薄膜上，作为后续化学沉积铜的催化剂。原子力显微镜图像、俄歇电子能谱和扫描俄歇电子图谱表明，铜被选择性地沉积在原始混合的LB膜的相分离图案上。
We report a versatile method to confine metal thin films in micro- and nanopatterns using directed self-assembly on the templates fabricated from phase-separated mixed Langmuir-Blodgett (LB) films. The pattern of the mixed LB films can be tuned by adjusting intermolecular interaction between the film-forming molecules in the LB films and by varying the fabrication conditions of the films such as the mixing ratio, subphase temperature, and surface pressure. We use the patterned LB films for templates to confine metal in patterned regions, taking advantage of the difference between the surface free energy of the patterned regions and that of the self-assembled monolayer of the silane coupling agent. Au nanoparticles are confined onto the patterned films as a catalyst for the succeeding Cu electroless deposition. The atomic force microscopic images, Auger electron spectra, and scanning Auger electron maps of a Cu-deposited film show that Cu is selectively deposited on the patterns of phase separation of the original mixed LB films.