One-step nanoimprinted Bragg grating sensor based on hybrid polymers
One-step nanoimprinted Bragg grating sensor based on hybrid polymers
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DOI：
10.1016/j.sna.2018.09.053
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发表时间：
2018-11-01
影响因子：
4.6
通讯作者：
Frey, L.
中科院分区：
文献类型：
--
作者：
Foerthner, M.;Girschikofsky, M.;Frey, L.
布拉格光栅传感器用于气体或液体的实时分析。传感器制造通常需要复杂的处理方法。为了扩大应用领域，在其制造期间减少工艺步骤和成本是必不可少的。在这项工作中，我们展示了一个创新的过程，一步制造集成布拉格光栅传感器和它们的成功应用温度和折射率传感。紫外增强衬底共形压印光刻（UV-SCIL）是用来复制表面浮雕布拉格光栅（SBG）传感器在全晶圆规模。将包括耦合器和结的平面波导系统的多个芯片蚀刻到硅晶片中。通过聚焦离子束加工，在波导上局部添加了纳米结构的SBG。通过UV-SCIL将传感器结构复制到市售的混合聚合物（OrmoComp（R））中。反射测量与不同的布拉格光栅进行了比较，模拟。结果显示窄带布拉格反射，与模拟一致。此外，研究了SBG的温度依赖性。压印的光栅结构具有-202 pm/℃的非常高的温度灵敏度。针对折射率匹配的液体和水溶液，确定了传感器对周围介质的不同折射率的响应。(C)2018爱思唯尔B. V.保留所有权利。
Bragg grating sensors are used for real-time analysis of gases or liquids. Complex processing methods are typically required for the sensor fabrication. A reduction of process steps and costs during their fabrication is essential in order to broaden the field of application. Within this work, we demonstrate an innovative process for a one-step fabrication of integrated Bragg grating sensors and their successful application for temperature and refractive index sensing. UV-enhanced substrate conformal imprint lithography (UV-SCIL) is used to replicate surface relief Bragg grating (SBG) sensors on a full wafer scale. Multiple chips of a planar waveguide system including couplers and junctions were etched into a silicon wafer. Nanostructured SBGs were locally added on the waveguides by focused ion beam processing. The sensor structures were replicated by UV-SCIL into a commercially available hybrid polymer (OrmoComp (R)). Reflection measurements with different Bragg gratings were performed and compared to simulations. The results reveal narrow-band Bragg reflections, coinciding with the simulations. Further, the temperature dependence of the SBGs was investigated. The imprinted grating structures featured a very high temperature sensitivity of -202 pm/degrees C. The sensor response to a varying refractive index of the surrounding medium was determined for index matching liquids and aqueous solutions. (C) 2018 Elsevier B.V. All rights reserved.