Titanium-containing glass for laser micromachining
Titanium-containing glass for laser micromachining
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用于激光微加工的含钛玻璃
DOI：
10.1117/12.540722
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
K. Tsunetomo
中科院分区：
文献类型：
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作者：
M. Shojiya;Hirotaka Koyo;K. Tsunetomo
结果表明，玻璃中的钛离子能有效地降低紫外激光辐照下的烧蚀阈值。含钛离子的玻璃显示出一个订单小阈值与其他商业玻璃用于光学或窗口。在Nd：YAG四次谐波激光266 nm照射下，获得了约200 mJcm ~（-2）的最低阈值。烧蚀阈值随玻璃中钛含量的增加而降低。另一方面，烧蚀率在玻璃组合物中氧化钛的摩尔比约为10 - 20摩尔%时显示出最大值。用KrF准分子激光器（248 nm）成功地制备了4 × 4平面微孔阵列（PMH）。由于良好的可加工性有效地防止了激光加工过程中的开裂和碎裂，PMH显示出良好的孔径均匀性（平均：129.9 μm），σ = 0.8 μm。
It was found that titanium ions in glasses are effective to reduce the ablation threshold in the UV laser irradiation. The glasses containing titanium ions showed one order smaller thresholds compared with other commercial glasses used for optics or windows. The lowest threshold around 200 mJcm-2 was obtained in 266-nm irradiation from a forth harmonics of Nd:YAG laser. The ablation threshold decreases with increasing the titanium concentration in the glass. On the other hand, the ablation rate shows the maximum value at the molar ratio of titanium oxide around 10 - 20 mol% in the glass composition. A 4 x 4 planer micro-hole array (PMH) consist of the titanium containing glasses was successfully fabricated with a KrF excimer laser (248 nm). Because of the good machinability effective to prevent cracking and chipping during the laser machining, the PMH showed good uniformity of hole diameter (average: 129.9 μm) with σ = 0.8 μm.