Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition
Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition
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DOI：
10.1016/j.carbon.2004.06.035
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发表时间：
2004-01-01
期刊：
影响因子：
10.9
通讯作者：
Holloway, BC
中科院分区：
文献类型：
--
作者：
Wang, JJ;Zhu, MY;Holloway, BC
采用电感耦合射频等离子体增强化学气相沉积技术，在H-2中稀释CH4，有效地合成了超薄片状碳纳米结构——碳纳米片。在没有催化剂的情况下，可以在各种各样的衬底上获得纳米片，包括金属、半导体和绝缘体。扫描电镜显示，片状结构立在衬底的边缘，具有波纹状表面。薄片的厚度为1纳米或更少，并且具有缺陷的石墨结构。拉曼光谱显示出典型的碳特征，D和G峰分别位于1350和1580 cm（-1）处。这两个峰的强度比I(D)/I(G)随甲烷浓度或底物温度的升高而增大，表明纳米片的结晶度降低。红外光谱和热解吸光谱揭示了氢与碳纳米片的结合。(C) 2004 Elsevier Ltd.版权所有。
An ultrathin sheet-like carbon nanostructure, carbon nanosheet, has been effectively synthesized with CH4 diluted in H-2 by an inductively coupled radio-frequency plasma enhanced chemical vapor deposition. Nanosheets were obtained without catalyst over a wide range of deposition conditions and on a variety of substrates, including metals, semiconductors and insulators. Scanning electron microscopy shows that the sheet-like structures stand on edge on the substrate and have corrugated surfaces. The sheets are 1 nm or less in thickness and have a defective graphite structure. Raman spectra show typical carbon features with D and G peaks at 1350 and 1580 cm(-1), respectively. The intensity ratio of these two peaks, I(D)/I(G), increases with methane concentration or substrate temperature, indicating that the crystallinity of the nanosheets decreases. Infrared and thermal desorption spectroscopies reveal hydrogen incorporation into the carbon nanosheets. (C) 2004 Elsevier Ltd. All rights reserved.