Templated bicontinuous Tin oxide thin film fabrication and the NO2 gas sensing
Templated bicontinuous Tin oxide thin film fabrication and the NO2 gas sensing
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DOI：
10.1016/j.jallcom.2015.11.015
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发表时间：
2016-02
影响因子：
6.2
通讯作者：
Xiaojing Zhao;Shi Wangzhou;H. Mu;Haifen Xie;F. Liu
中科院分区：
文献类型：
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作者：
Xiaojing Zhao;Shi Wangzhou;H. Mu;Haifen Xie;F. Liu
摘要以纳米多孔金（NPG）结构为模板，采用原子层沉积（ALD）、退火和酸洗等方法制备了双连续氧化锡（SnO 2）薄膜。SnO 2薄膜对NO2气体具有很高的灵敏度.在300° C的最佳工作温度下，在干N2气流中的检测限低至170 ppb，快速响应/恢复时间为40/130 s气体传感器的性能与工作温度和暴露环境的关系表明，气体响应强烈依赖于O2，O2-，O-，NO2-和NO3-的动态平衡。我们的研究不仅表明这种双连续SnO 2薄膜是一种很有前途的敏感气体传感器，而且对NO2气敏机理提供了深刻的理解。
Abstract Bicontinuous Tin oxide (SnO 2) thin films were fabricated by atomic layer deposition (ALD), annealing, and acid washing with nanoporous gold (NPG) structure serving as templates. The resultant SnO 2 films show high sensitivity on NO 2 gas. The detection limit is as low as 170 ppb in dry N 2 flow with a rapid response/recovery time of 40/130 s at the optimized working temperature of 300° C. The performances dependence of the gas sensor on the working temperatures and the exposure environments reveal that the gas responses strongly rely on the dynamic balance of O 2, O 2−, O−, N O 2−, and N O 3−. Our study not only shows this bicontinuous SnO 2 films is promising for sensitive gas sensor but also provides insightful understanding on the NO 2 gas sensing mechanism.