K.Ino, T.Shinohara, T.Ushiki, and T.Ohmi: ""Crystallographic and Electrical Properties of Sputter-deposited Ta Thin Films formed under Various Ion Bombardment Conditions, "" AVS 43rd National Symposium, Philadelphia. 189 (1996)

K.Ino, T.Shinohara, T.Ushiki, and T.Ohmi: ""Crystallographic and Electrical Properties of Sputter-deposited Ta Thin Films formed under Various Ion Bombardment Conditions, "" AVS 43rd National Symposium, Philadelphia. 189 (1996)
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K.Ino、T.Shinohara、T.Ushiki 和 T.Ohmi:“在各种离子轰击条件下形成的溅射沉积 Ta 薄膜的晶体学和电学特性”,AVS 第 43 届全国研讨会,费城。

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