Bilayer Al wire-grids as broadband and high-performance polarizers
Bilayer Al wire-grids as broadband and high-performance polarizers
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DOI：
10.1364/oe.14.002323
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发表时间：
2006-03-20
期刊：
影响因子：
3.8
通讯作者：
Sigg, H
中科院分区：
文献类型：
--
作者：
Ekinci, Y;Solak, HH;Sigg, H
我们制作了双层（或堆叠）金属线栅，并对其性能进行了理论分析。利用极紫外干涉光刻技术制备了周期为100 nm的样品。这些器件在可见光范围内的传输效率超过50%，消光比高于40 dB。使用时域有限差分算法的模拟结果与实验结果一致，并表明透射光谱由法布里-珀罗干涉和近场耦合的两层结构之间。简单的制造方法只涉及一个单一的光刻步骤，没有任何蚀刻，并保证精确的对准和分离的两个线栅相对于彼此。(c)2006年美国光学学会。
We have fabricated, characterized and theoretically analyzed the performance of bilayer (or stacked) metallic wire-grids. The samples with 100 nm period were fabricated with extreme-ultraviolet interference lithography. Transmission efficiency over 50% and extinction ratios higher than 40 dB were measured in the visible range with these devices. Simulations using a finite-difference time-domain algorithm are in agreement with the experimental results and show that the transmission spectra are governed by Fabry-Perot interference and near-field coupling between the two layers of the structure. The simple fabrication method involves only a single lithographic step without any etching and guarantees precise alignment and separation of the two wire-grids with respect to each other. (c) 2006 Optical Society of America.