Erbium doping of molecular beam epitaxial GaAs
Erbium doping of molecular beam epitaxial GaAs
复制标题
分子束外延GaAs的铒掺杂
DOI:
10.1063/1.98127
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发表时间:
1987
影响因子:
4
通讯作者:
M. Maier
中科院分区:
文献类型:
--
作者:
R. Smith;H. Müller;H. Ennen;P. Wennekers;M. Maier
The doping of molecular beam epitaxial GaAs with erbium up to a concentration of 2×1019 cm−3 has been successfully demonstrated. Up to a concentration of about 5×1018 cm−3 the surface morphology remained good but for higher doping levels the surface became structured. Hall and profile measurements indicate that erbium doping gives rise to a trapping level capable of compensating silicon‐doped layers. For the first time photoluminescence from a rare earth element incorporated in a III‐V semiconductor has been observed at room temperature.