Periodic nanostructures on Si(100) surfaces generated by high-repetition rate sub-15 fs pulsed near-infrared laser light.
Periodic nanostructures on Si(100) surfaces generated by high-repetition rate sub-15 fs pulsed near-infrared laser light.
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DOI：
10.1364/ol.37.000190
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发表时间：
2012-01
期刊：
影响因子：
3.6
通讯作者：
M. Straub;M. Afshar;D. Feili;H. Seidel;K. König
中科院分区：
文献类型：
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作者：
M. Straub;M. Afshar;D. Feili;H. Seidel;K. König
利用亚纳米焦耳脉冲能量的800 nm、12ps、85 MHz的紧聚焦激光，在浸泡在水中的Si(100)表面上产生了周期为130 nm的纳米级裂隙和波纹。在接近消融阈值的辐射曝光下，裂缝的宽度通常为20-50 nm，深度为70 nm，垂直于激光偏振。随着辐照度的增加，裂隙变宽并形成周期性波纹，而在最高曝光量时，出现了随机的纳米孔表面拓扑结构。裂隙和波纹的形成是由激光诱导的驻留表面等离子体波引起的耗散和烧蚀的周期性变化所解释的。
Nanoscale rifts and ripples at a periodicity of 130 nm were generated on Si(100) surfaces immersed in water using tightly focused 800 nm 12 fs pulsed 85 MHz laser light at subnanojoule pulse energies. At radiant exposure close to the ablation threshold rifts were typically 20-50 nm in width and 70 nm in depth running perpendicular to the laser polarization. On increase of the irradiance, the rifts broadened and formed periodic ripples, whereas at highest exposure, a random nanoporous surface topology emerged. Rift and ripple formation is explained by laser-induced standing surface plasma waves, which result in periodic variation of dissipation and ablation.