Design, analysis and optimization of an electromagnetic actuator for a micro impedance pump
Design, analysis and optimization of an electromagnetic actuator for a micro impedance pump
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DOI：
10.1088/0960-1317/19/8/085026
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发表时间：
2009-08-01
影响因子：
2.3
通讯作者：
Lee, Chia-Yen
中科院分区：
文献类型：
--
作者：
Chang, Hsien-Tsung;Wen, Chih-Yung;Lee, Chia-Yen
本研究设计并优化一种用于无阀微阻抗泵的电磁致动器。致动器被建模为具有安装在柔性PDMS隔膜上的电镀永磁体和在底部玻璃基板上图案化的平面铜微线圈。致动器的组成部分，即隔膜，微线圈和磁体，以最大化致动力的方式进行建模，分析和优化，同时确保装置的机械完整性。在进行分析时，基于薄板理论开发了行程容积和膜片挠度的理论和数学模型。对设计模型进行了理论和数值验证，系统地探讨了电磁力、膜片位移和膜片强度之间的关系。总之，结果表明，在优化的设备中，20 μ m的目标膜片偏转可以使用由0.8 A的微线圈输入电流产生的12 μ N的压缩力来获得。本研究中提出的电磁致动器为各种生物医学芯片和微流体应用的泵送要求提供了理想的解决方案，因此对芯片实验室系统的持续发展做出了宝贵的贡献。
This study designs and optimizes an electromagnetic actuator for use in a valveless micro impedance pump. The actuator is modeled to have an electroplated permanent magnet mounted on a flexible PDMS diaphragm and a planar copper micro-coil patterned on a bottom glass substrate. The constituent parts of the actuator, namely the diaphragm, the micro-coil and the magnet, are modeled, analyzed and optimized in such a way as to maximize the actuating force while simultaneously ensuring the mechanical integrity of the device. In performing the analyses, theoretical and mathematical models of the stroke volume and diaphragm deflection are developed based on thin plate theory. The design models are verified theoretically and numerically, and the relationships between the electromagnetic force, the diaphragm displacement and the diaphragm strength are systematically explored. Overall, the results reveal that in the optimized device, the target diaphragm deflection of 20 mu m can be obtained using a compression force of 12 mu N developed by a micro-coil input current of 0.8 A. The electromagnetic actuator proposed in this study provides an ideal solution for the pumping requirements of a variety of biomedical chips and microfluidic applications and therefore represents a valuable contribution to the ongoing development of lab-on-a-chip systems.