Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane
Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane
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DOI：
10.1109/jlt.2006.871117
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发表时间：
2006
影响因子：
4.7
通讯作者：
Che-Lung Hsu;Yung-Chih Liu;Chih-Ming Wang;Mount-Learn Wu;Ya-Lun Tsai;Yue-Hong Chou;Chien-Chieh Lee;Jenq-Yang Chang
中科院分区：
文献类型：
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作者：
Che-Lung Hsu;Yung-Chih Liu;Chih-Ming Wang;Mount-Learn Wu;Ya-Lun Tsai;Yue-Hong Chou;Chien-Chieh Lee;Jenq-Yang Chang
本文采用体微机械加工技术实现了一种基于氮化硅薄膜的单层导模谐振（GMR）滤波器。没有下包层的光栅和波导结构，即，衬底同时制造在氮化硅膜上。该器件可用作透射带阻滤波器，具有结构简单、效率高、可与其它光电器件集成在微系统芯片上等优点。本文给出了设计考虑、制作过程和实测光谱响应。此外，通过堆叠两个所提出的器件，在低于10%的透射率处的阻带的/spl Δ//spl λ/为5.06nm。
In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices, /spl Delta//spl lambda/ of the stopband at a transmission below 10% is 5.06 nm.