Air Damping Analysis in Comb Microaccelerometer
Air Damping Analysis in Comb Microaccelerometer
复制标题
DOI：
10.1155/2014/373172
复制
发表时间：
2014-04
影响因子：
2.1
通讯作者：
Wu Zhou;Yu Chen;B. Peng;Hui Yang;Huijun Yu;Heng Liu;Xiaoping He
中科院分区：
文献类型：
--
作者：
Wu Zhou;Yu Chen;B. Peng;Hui Yang;Huijun Yu;Heng Liu;Xiaoping He
空气阻尼对MEMS加速度计的动态特性有着重要的影响。微尺度效应与MEMS器件的结构布局和尺寸密切相关。研究了梳状微加速度计的阻尼现象。固定板电极和可动板电极之间的空气不能自由流动而被压缩。因此，空气阻尼同时表现出粘性效应和刚度效应。前者产生类似于宏观力学系统中的拖曳力，并且阻尼力与可移动电极的速度成比例。后者加强了结构的刚度，其加强程度与电容器的差距值、内部压力和温度有关。本文重点研究挤压膜空气阻尼对电容器间隙的依赖性。仿真和实验表明，随着结构尺寸的减小，差距的大小对挤压油膜效应的影响显著。在梳状微加速度计的阻尼设计中考虑了加工误差的影响。
Air damping significantly influences the dynamical characteristics of MEMS accelerometers. Its effects at micro-scale level sharply depend on the structure layouts and size of MEMS devices. The damping phenomenon of comb microaccelerometers is investigated. The air between fixed plate electrodes and movable plate electrodes cannot flow freely and is compressed. The air damping, therefore, exhibits both viscous effects and stiffness effects. The former generates a drag force like that in macromechanical systems, and the damping force is proportional to the velocity of movable electrodes. The latter stiffens the rigidity of structure, and the stiffening level is related to the gap value of capacitors, internal pressure, and temperature. This paper focuses on the dependence of the squeeze film air damping on capacitor gaps. The simulation and experiments indicate that the squeeze film effect is sharply affected by the gap value when the structural dimensions decrease. And the influence of fabrication errors is considered in damping design in comb microaccelerometers.