A novel method to fabricate functional oxide thin film: Hybrid approach of atmospheric-pressure plasma and chemical solution deposition process
A novel method to fabricate functional oxide thin film: Hybrid approach of atmospheric-pressure plasma and chemical solution deposition process
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一种制备功能性氧化物薄膜的新方法:常压等离子体和化学溶液沉积工艺的混合方法
DOI:
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发表时间:
2018
期刊:
影响因子:
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通讯作者:
伯田幸也
中科院分区:
文献类型:
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作者:
清水禎樹;伯田幸也