The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations
The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations
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DOI：
10.1063/1.4841675
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发表时间：
2013-12
影响因子：
4
通讯作者：
A. Greb;K. Niemi;D. O’Connell;T. Gans
中科院分区：
文献类型：
--
作者：
A. Greb;K. Niemi;D. O’Connell;T. Gans
研究了不同表面条件下电容耦合氧等离子体中的等离子体参数和动力学。亚稳单重态氧表面损失几率(SDO)对亚稳粒子浓度、电负性、粒子密度的空间分布以及电离动力学有显著影响。用相分辨光学发射光谱对模拟的表面条件与等离子体-表面界面区的实验进行了比较。文中还展示了如何使用激发特征的现场测量来确定不同表面材料的SDO表面损失概率。
Plasma parameters and dynamics in capacitively coupled oxygen plasmas are investigated for different surface conditions. Metastable species concentration, electronegativity, spatial distribution of particle densities as well as the ionization dynamics are significantly influenced by the surface loss probability of metastable singlet delta oxygen (SDO). Simulated surface conditions are compared to experiments in the plasma-surface interface region using phase resolved optical emission spectroscopy. It is demonstrated how in-situ measurements of excitation features can be used to determine SDO surface loss probabilities for different surface materials.