Sub-wavelength GaN-based membrane high contrast grating reflectors.
Sub-wavelength GaN-based membrane high contrast grating reflectors.
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DOI：
10.1364/oe.20.020551
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发表时间：
2012-08
期刊：
影响因子：
3.8
通讯作者：
Tzeng-Tsong Wu;Yu-Cheng Syu;Shu-Hsien Wu;W. T. Chen;T. Lu;Shing-chung Wang;Chiang Pang Hai;D. Ts
中科院分区：
文献类型：
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作者：
Tzeng-Tsong Wu;Yu-Cheng Syu;Shu-Hsien Wu;W. T. Chen;T. Lu;Shing-chung Wang;Chiang Pang Hai;D. Ts
制作并研究了GaN基薄膜高对比度光栅（HCG）反射器。通过严格耦合波分析和时域有限差分法计算了实现宽带高反射率光谱所需的光栅周期、光栅高度、填充因子和气隙高度等结构参数。在优化模拟结果的基础上，采用电子束光刻和聚焦离子束工艺制备了GaN基薄膜型异质结栅。利用微反射率光谱仪测量了GaN基薄膜HCG反射器在TE偏振方向上的反射率，结果表明反射器在460 nm波段具有较高的反射率，阻带宽度为60 nm。实验结果也表明了良好的协议与模拟。我们相信，这项研究将有助于GaN基的蓝色或紫外区的新型发光器件的开发。
The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region.