Shear-horizontal-type surface acoustic wave on langasite with Au or Ta/sub 2/O/sub 5/ thin film
Shear-horizontal-type surface acoustic wave on langasite with Au or Ta/sub 2/O/sub 5/ thin film
复制标题
Au或Ta/sub 2/O/sub 5/薄膜硅锰矿上的剪切水平型表面声波
DOI：
10.1109/ultsym.2003.1293339
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Y. Nakagawa
中科院分区：
文献类型：
--
作者：
S. Kakio;M. Nozawa;Y. Nakagawa
研究了纯水平剪切型声表面波在旋转Y切90/spl deg/X传播硅酸镓（Euler角为（0/spl deg/，/spl theta/，90/spl deg/））表面上的传播特性，该表面具有高密度薄膜，如金（Au）或五氧化二钽（Ta/sub 2/O/sub 5/）介质膜.理论分析表明，在一定条件下，通过在衬底上加载这些薄膜，耦合因子增加到约1.0%。实际上，对于Au膜厚度为0.015波长（/spl λ/）的样品和Ta/sub 2/O/sub 5/膜厚度为0.047 /spl λ/的样品，耦合因子的测量值分别为0.80%和0.61%。对于这两种膜，测得的频率随温度变化的变化表明，具有零温度延迟系数的温度特性，与ST-90/spl deg/X石英具有自由表面相同，可以通过选择适当的膜厚度来获得。
The propagation characteristics of a pure shear-horizontal-type surface acoustic wave on rotated Y-cut 90/spl deg/X propagation langasite, having Euler angles of (0/spl deg/, /spl theta/, 90/spl deg/), with a high-density thin film, such as a gold (Au) film or a tantalum pentoxide (Ta/sub 2/O/sub 5/) dielectric film, are investigated. The theoretical analysis showed that, by loading the substrate with these films, the coupling factor increases to approximately 1.0% under a certain condition. In fact, the measured values of the coupling factor were 0.80% and 0.61% for a sample with a Au film thickness of 0.015 wavelength (/spl lambda/) and a sample with a Ta/sub 2/O/sub 5/ film thickness of 0.047 /spl lambda/, respectively. For both films, the measured frequency shifts with temperature change showed that a temperature characteristic with a zero temperature coefficient of delay, the same as ST-90/spl deg/X quartz with a free surface, can be obtained by choosing the appropriate film thickness.