PLASMA-AIDED MANUFACTURING
PLASMA-AIDED MANUFACTURING
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DOI：
10.1007/bf01054812
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发表时间：
1993-12-01
影响因子：
1.1
通讯作者：
SHOHET, JL
中科院分区：
文献类型：
--
作者：
SHOHET, JL
等离子体辅助制造用于生产具有不寻常和上级性能的新材料，用于开发新的化合物和工艺，用于机械加工，以及用于改变和精炼材料和表面。等离子体辅助制造直接应用于半导体制造、材料合成、焊接、照明、聚合物、防腐蚀涂层、机床、冶金、电气和电子设备、危险废物清除、高性能陶瓷以及美国高科技和传统工业中的许多其他项目。
Plasma-aided manufacturing is used for producing new materials with unusual and superior properties, for developing new chemical compounds and processes, for machining, and for altering and refining materials and surfaces. Plasma-aided manufacturing has direct applications to semiconductor fabrication, materials synthesis, welding, lighting, polymers, anti-corrosion coatings, machine tools, metallurgy, electrical and electronics devices, hazardous waste removal, high performance ceramics, and many other items in both the high-technology and the more traditional industries in the United States.