Surface modification of titanium through amino group implantation.
Surface modification of titanium through amino group implantation.
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通过氨基注入对钛进行表面改性。
DOI：
10.1002/1097-4636(20010605)55:3
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
Z. Q. Chen
中科院分区：
文献类型：
--
作者：
Y. Yang;J. Tian;J. Tian;Z. Q. Chen
我们通过在10（16）和10（17）cm（-2）处注入氨基（NH（2+））基团来修饰Ti表面。采用X射线衍射（XRD）、X射线光电子能谱（XPS）、扫描俄歇电子能谱（AES）和二次离子质谱（西姆斯）对注入表面进行了表征。实验结果表明，由于污染，注入后的钛表面覆盖了一层以碳氢化合物为主的氧化层，注入后的钛表面氧化层变厚。XPS、AES和西姆斯深度分布表明，注入元素具有典型的离子注入分布，并形成氮化钛（TiN）。
We modified Ti surfaces by implantation of amino (NH(2+)) groups at 10(16) and 10(17) cm(-2). The implanted surfaces were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning Auger electron spectroscopy (AES), and second ion mass spectroscopy (SIMS). The experimental results showed that the implanted Ti specimens were covered by a dominant hydrocarbon overlayer due to contamination and the surface oxide layer of implanted specimens became thicker. XPS, AES, and SIMS depth profiles showed that implanted elements had a typical ion implantation distribution and that titanium nitride (TiN) was formed.