Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator
Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator
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DOI：
10.1109/jphot.2009.2031596
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发表时间：
2009-09-01
影响因子：
2.4
通讯作者：
Bienstman, Peter
中科院分区：
文献类型：
--
作者：
Claes, Tom;Girones Molera, Jordi;Bienstman, Peter
我们提出了一个槽波导为基础的环形谐振器在绝缘体上硅（SOI）的足迹只有13 μ m × 10 μ m，制造与光学光刻。实验表明，该传感器的灵敏度为298 nm/RIU，检测限为4：2。10（-5）RIU用于顶部包层的折射率的变化。我们证明了第一次，表面化学的选择性无标记传感的蛋白质可以应用于一个100 nm宽的槽区域内，并证明了槽波导的应用程序，而不是一个正常的波导增加了灵敏度的SOI环形谐振器的一个因素3.5检测蛋白质。
We present a slot-waveguide-based ring resonator in silicon on insulator (SOI) with a footprint of only 13 mu m x 10 mu m, fabricated with optical lithography. Experiments show that it has 298 nm/RIU sensitivity and a detection limit of 4: 2 . 10(-5) RIU for changes in the refractive index of the top cladding. We prove for the first time that surface chemistry for selective label-free sensing of proteins can be applied inside a 100 nm-wide slot region and demonstrate that the application of a slot waveguide instead of a normal waveguide increases the sensitivity of an SOI ring resonator with a factor 3.5 for the detection of proteins.