Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments
Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments
复制标题
MoS2基薄膜暴露于原子氧环境的侵蚀机制
DOI：
10.1021/acsami.5b02709
复制
发表时间：
2015-06-17
影响因子：
9.5
通讯作者：
Liu, Weimin
中科院分区：
文献类型：
--
作者：
Wang, Peng;Qiao, Li;Liu, Weimin
研究了磁控溅射MoS_2薄膜在原子氧环境中的腐蚀机制，并与掺钛MoS_2和MoS_2/Ti多层膜进行了比较。用卢瑟福背散射(RBS)和聚焦离子束结合扫描电子显微镜(FIB&SEM)研究了薄膜的成分和结构随入射剂量的变化。RBS结果表明，硫原子受到入射原子氧原子的侵蚀，脱硫量随入射流量的增加而增加，但侵蚀速率随入射流量的增加而减小。对于纯MoS_2薄膜，在研究注量为4.8×10~(21)O·cm~(-2)时，薄膜的腐蚀转变为饱和，而对于掺钛薄膜和MoS_2/Ti多层膜，硫侵蚀的饱和时间较早，分别在5.2×10~(19)和2.6×10~(19)O cm~(-2)附近。纤维截面结果表明，沉积的MoS_2薄膜中存在的孔结构提供了一条反应通道，使入射的原子氧能够到达底部的硫并与之反应。钛掺杂或MoS_2/Ti多层结构的引入明显降低了初始薄膜中的气孔和缺陷密度，从而抑制或阻止了腐蚀过程，并且在真空滑动条件下可以很好地保持MoS_2相的本征润滑性能。
The erosion mechanism of magnetron sputtered MoS2 films exposed to the atomic oxygen environment was studied and compared with the Ti-doped MoS2 and MoS2/Ti multilayer films. The compositional and structural changes were investigated as a function of incident fluence by Rutherford back scattering (RBS) and focused ion beam combining with scanning electron microscopy (FIB&SEM). The RBS results indicate that the sulfur atoms are eroded by the incident atomic oxygen atoms and the removed sulfur amount increases but the erosion rate decreases with increasing of incident fluence. For pure MoS2, films the erosion process turns to saturate at the end of investigated fluence of 4.8 x 10(21) O cm(-2), and for Ti-doped and MoS2/Ti multilayer films the saturation of sulfur erosion is much earlier around incident fluence of 5.2 x 10(19) and 2.6 x 10(19) O cm(-2), respectively. FIB cross-section results reveal that pores structures present in the as-deposited MoS2 films provide a reaction highway, which allows the incident atomic oxygen to be able to reach and react with the sulfur at bottom. Introducing titanium doping or MoS2/Ti multilayer structures definitely reduce the density of pores and defects in the initial films, consequently, erosion process is suppressed or blocked, and the instinct lubricant properties of MoS2 phases can be well-retained in vacuum sliding conditions.