Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry.
Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry.
复制标题
通过相移和白光干涉测量获得的粗糙度测量之间的差异。
作者：
H. Rhee;T. Vorburger;Jonathan W. Lee;J. Fu
在台阶高度和表面粗糙度的测量中，相移法和白光干涉法之间存在差异。这些误差与表面的平均粗糙度参数有很大关系。在阶跃高度的白光干涉测量中，主要发生在样品峰、谷和边缘附近的偏斜效应导致了这一问题。对于粗糙度，考虑了两个可能的差异来源。
Discrepancies between phase-shifting and white-light interferometry have been observed in step-height and surface roughness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, causes this problem in white-light interferometry of step height. For roughness, two possible sources of the discrepancy are considered.