LCL Filter Design and Implementation for Improving Transient Position Tracking Control Performance of Voice Coil Motor
LCL Filter Design and Implementation for Improving Transient Position Tracking Control Performance of Voice Coil Motor
复制标题
提高音圈电机瞬态位置跟踪控制性能的LCL滤波器设计与实现
DOI：
10.1109/access.2019.2963095
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发表时间：
2020
期刊：
影响因子：
3.9
通讯作者：
Jianhui Hu
中科院分区：
文献类型：
--
作者：
Baochao Wang;Cheng Liu;Zhiwei Wu;Jianhui Hu
音圈电机具有线性度高、无齿槽转矩等优点，在高精度位置伺服控制中得到广泛应用。传统的驱动方式有两种：PWM斩波驱动和模拟驱动。PWM斩波驱动通常会产生电流纹波，影响位置控制精度。可接受的电流涟漪限制了DC总线电压的增加，并且不能实现更快的响应。另一方面，模拟驱动使用功率放大器，其不受电流涟漪的影响，但可能导致高功率损耗。这种功率损耗也可能影响精度或导致冷却困难，特别是对于热敏应用，如半导体光刻。本文提出了一种采用LCL滤波器的VCM斩波驱动电路及其滤波器设计方法。与传统的并网逆变器LCL滤波器设计只关注稳态电流质量不同，本文提出的LCL滤波器设计针对瞬态位置控制，它考虑了电流涟漪，瞬态位置跟踪时间和附加体积。利用所设计的滤波器，在保证电流涟漪的情况下，可以缩短位置跟踪时间。为了补偿LCL滤波器引起的延迟，增加了直流驱动电压。在相同的电流涟漪水平下，采用LCL滤波器和较高的直流电压比不采用LCL滤波器和较低的电压可以获得更快的位置响应速度。仿真和实验结果验证了结果。
Voice coil motor (VCM) is widely used in high precision position servo control for its merits of high linearity and no cogging-torque. There are two conventional driving modes: PWM chopper drive and analog drive. PWM chopper drive usually results in current ripples, which could affect position control precision. Acceptable current ripple limits the increase in the DC bus voltage and could not achieve faster response. On the other hand, analog drive uses power amplifiers, which does not suffer from current ripple but can result in high power loss. Such power loss could also affect precision or result in cooling difficulty, especially for thermal-sensitive applications such as semi-conductor lithography. In this paper, a VCM chopping drive with an LCL filter together with filter design method is proposed. Unlike conventional LCL filter design for grid inverter that only focuses on steady state current quality, the proposed LCL filter design in this paper aims at transient position control, which considers the current ripple, transient position tracking time and additional volume. With the designed filter, position tracking time can be shortened with acceptable current ripple. To compensate the delay caused by LCL filter, the DC drive voltage is increased. And under the same current ripple level, with LCL filter and higher DC voltage can get faster position response speed than without LCL filter and lower voltage. The results are validated by simulation and experimental results.
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影响因子：
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作者：
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DOI：
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发表时间：
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期刊：
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影响因子：
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DOI：
10.1109/ipemc.2016.7512318
发表时间：
2016-05
期刊：
2016 IEEE 8th International Power Electronics and Motion Control Conference (IPEMC-ECCE Asia)
影响因子：
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DOI：
10.1109/ecce.2015.7309824
发表时间：
2015-10
期刊：
2015 IEEE Energy Conversion Congress and Exposition (ECCE)
影响因子：
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作者：
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